Absorption, Transmission, Reflectivity, Refractive index
Stress, Strain, Toughness, Strength, Elasticity
Little deformation- low toughness
Size dependent properties (large grain vs. small grain)
Elastic modulus: Pa
Yield strength: Pa
Ultimate strength: Pa
Accelerometer (air bag deployment, iphone), mirror arrays for TV and dispalys, cantilever biosensors, inkjet pinting, electronic noses, fluidic chambers, RF resonators(inductors, capacitors)
two parts: the first is a lump (often called the proof mass or seismic mass) suspended by means of a spring formed at each end; and the second is a pair of fixed sensing electrodes that enable the electronics to detect the movement of the lump relative to the surrounding platform of silicon.
Cantilever beam properties
Operating a cantilever array in liquid opens up a variety of new applications, for example in biochemistry. The surface of the cantilever can be functionalized via thiol chemistry with biomolecules to observe very specific biochemical reactions, such as DNA hybridization and antibody-antigen interactions (key-lock principle).
Micro hot plate array as the basis of a ‘chemical nose’
The microhotplate is a multi-layer structure which has three functional layers: a polysilicon heater, a metal (for example Al or W) thermometer/heat distribution plate, and sensing film electrical contacts. These layers are separated by insulating layers of SiO2. For the device shown above, there are 10 electrical lines leading onto the suspended structure: two for the heater, four for a van der Pauw measurement on the metal plate, and four for the sensing contacts.
Heat (Cannon, HP, Agilent)
electric current through a heating element vaporizes the ink making a bubble that pushes out ink
Piezo electric (Epson)
Mechanically pushes the pushes the liquid out of a hole